Monolithic Three-Dimensional 65-nm CMOS-Nanoelectromechanical Reconfigurable Logic for Sub-1.2-V Operation
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DOI: 10.1109/led.2017.2726685
Abstract: Monolithic three-dimensional (M3D) CMOS-nanoelectromechanical (CMOS-NEM) reconfigurable logic (RL) circuits are experimentally demonstrated. This is the first experimental demonstration of 65-nm M3D CMOS-NEM RL circuits satisfying the 1.2-V supply voltage ( ${V}_{\mathsf {DD}}$ ) requirement of… read more here.
Keywords: three dimensional; dimensional cmos; cmos nanoelectromechanical; reconfigurable logic ... See more keywords