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Published in 2017 at "Nano Today"
DOI: 10.1016/j.nantod.2017.07.001
Abstract: Abstract Two-dimensional (2D) semiconductors have attracted considerable attentions from electronic-engineering community due to their unique electronic properties. Especially, the inherent advantage of scaling semiconductor into atomic thickness has raised the prospect of possible extension of…
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Keywords:
engineering;
engineering two;
dimensional electronics;
semiconductor ... See more keywords
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Published in 2019 at "ACS Applied Nano Materials"
DOI: 10.1021/acsanm.9b02153
Abstract: An atomic layer deposition (ALD) process is reported for the growth of nanoscale PrAlO3 thin films for two-dimensional electronics and memory device applications using tris(isopropylcyclopentadieny...
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Keywords:
dimensional electronics;
atomic layer;
two dimensional;
layer deposition ... See more keywords