Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices
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DOI: 10.1038/s41928-017-0007-7
Abstract: Advances in nanophotonics and plasmonics have led to the creation of a variety of innovative optical components and devices. However, the development of powerful practical applications has so far been limited. Here we show that… read more here.
Keywords: three dimensional; dimensional nand; memory devices; flash memory ... See more keywords