Two-dimensional stitching interferometry based on tilt measurement.
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DOI: 10.1364/oe.26.023278
Abstract: In this paper, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage… read more here.
Keywords: stitching interferometry; dimensional stitching; surface; two dimensional ... See more keywords