Analysis of the eight parameter variation of the resonant tunneling diode (RTD) in the rapid thermal annealing process with resistance compensation effect
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DOI: 10.1063/1.5133899
Abstract: The rapid thermal annealing process is a key technology to control the parameters of the resonant tunneling diode (RTD) and to achieve high performance for the device. In this paper, the rapid ther... read more here.
Keywords: annealing process; rapid thermal; diode rtd; thermal annealing ... See more keywords