Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope
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DOI: 10.3390/mi10040264
Abstract: A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a waveguide micro-ring resonator was proposed. This sensor was operated by measuring the shift of the transmission spectrum. Modal analysis was carried out for the disc… read more here.
Keywords: sensitive structure; disc sensitive; resonator gyroscope; structure ... See more keywords