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Published in 2021 at "Instruments and Experimental Techniques"
DOI: 10.1134/s0020441221030313
Abstract: The dependence of the sputtering efficiency for a Mo mirror mock-up on the discharge power and the pressure of the working gas (Ar) has been investigated for three options of grounding of the discharge-cell elements…
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Keywords:
mirror;
plasma cleaning;
discharge;
entrance mirror ... See more keywords