Behavior of high current density pulsed magnetron discharge with a graphite target
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DOI: 10.1088/1361-6595/ac3341
Abstract: Conventional magnetron discharge with a graphite target is a technology used worldwide to deposit thin films for a large range of applications. In the last decade, the high current density sputtering regime stands out as… read more here.
Keywords: current density; density; graphite target; high current ... See more keywords