Self-consistent integrated modeling of combined hybrid discharge-laser produced plasma devices for extreme ultraviolet metrology
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DOI: 10.1063/5.0147234
Abstract: Discharge- and laser-produced plasma (DLPP) devices are being used as light sources for extreme ultraviolet (EUV) generation. A key challenge for both, DPP and LPP, is achieving sufficient brightness to support the throughput requirements of… read more here.
Keywords: laser; discharge laser; euv; laser produced ... See more keywords