On the Discharge Transport Mechanisms Through the Dielectric Film in MEMS Capacitive Switches
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DOI: 10.1109/jmems.2019.2962068
Abstract: A method that allows the investigation of discharge transport mechanism in dielectric films used in MEMS capacitive switches or MIM capacitors or even bare dielectric films is presented. The method is based on monitoring the… read more here.
Keywords: mems capacitive; dielectric film; capacitive switches; film ... See more keywords