Energy distribution of negatively and positively charged ions in a magnetron sputtering discharge with a tungsten cathode and a positively biased anode in an argon/oxygen gas mixture
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DOI: 10.1088/1361-6595/ad8dfa
Abstract: The energy distribution of negatively and positively charged ions in a magnetron discharge with a positively biased anode is investigated. A tungsten cathode operated in an argon/oxygen gas mixture is employed. The magnetron is operated… read more here.
Keywords: energy distribution; magnetron sputtering; distribution negatively; cathode ... See more keywords