Angular and velocity distributions of tungsten sputtered by low energy argon ions
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DOI: 10.1016/j.jnucmat.2017.09.021
Abstract: Abstract Sputtering by ions with low near-threshold energies is investigated. Experiments and simulations are conducted for tungsten sputtering by low-energy, 85–200 eV Ar atoms. The angular distributions of sputtered particles are measured. A new method for… read more here.
Keywords: distributions tungsten; energy; angular velocity; velocity distributions ... See more keywords