Divided-aperture subtraction-differential confocal method with nanoscale axial resolution.
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DOI: 10.1364/ao.58.003252
Abstract: In this paper, a divided-aperture subtraction-differential confocal method (DASDCM) is proposed to meet the requirements of nanoscale noncontact height measurements for precision machining, materials science, and biology. The DASDCM divides the spot on the detection… read more here.
Keywords: divided aperture; axial resolution; aperture subtraction; subtraction ... See more keywords