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   Articles with "dof flexure" as a keyword



Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage

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recommendations! Published in 2019 at "Mathematical Problems in Engineering"

DOI: 10.1155/2019/8501583

Abstract: A multibody dynamic model is developed for dynamic analysis of a 5-DOF flexure-based nanopositioning stage in the projection optical system of the semiconductor lithography in this paper. The 5-DOF stage is considered as an assembly… read more here.

Keywords: dof flexure; based nanopositioning; dof; flexure ... See more keywords