Donor incomplete ionization and mobility enhancement in ultra-thin silicon-on-insulator films doped by phosphorus end-terminated polymers
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DOI: 10.1039/d4tc01886a
Abstract: Ex-situ doping of ultra-thin silicon-on-insulator (SOI) substrates is performed by using polymers terminated with a doping containing moiety. The injection of P impurity atoms is investigated confining the same P... read more here.
Keywords: ultra thin; silicon insulator; donor incomplete; thin silicon ... See more keywords