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Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.03.016
Abstract: Abstract In the present study, molybdenum doped chromium nitride coatings deposited onto silicon substrates via unbalanced magnetron sputtering, in as-deposited and annealed conditions, at 500–800 °C in steps of 100 °C, were studied to reveal their temperature…
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Keywords:
doped crn;
crn coatings;
annealing impact;
studies annealing ... See more keywords