Cu-Doped TiNxOy Thin Film Resistors DC/RF Performance and Reliability
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DOI: 10.3390/app11167498
Abstract: We fabricated Cu-doped TiNxOy thin film resistors by using atomic layer deposition, optical lithography, dry etching, Ti/Cu/Ti/Au e-beam evaporation and lift-off processes. The results of the measurements of the resistance temperature dependence, non-linearity, S-parameters at… read more here.
Keywords: film resistors; thin film; resistance; film ... See more keywords