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Published in 2019 at "Journal of Applied Physics"
DOI: 10.1063/1.5065385
Abstract: Precise control of dopant placement is crucial for the reproducible, and reliable, nanoscale semiconductor device fabrication. In this paper, we demonstrate an atomic force microscopy (AFM) probe assisted localized doping of aluminum into an n-type…
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Keywords:
localized doping;
microscopy;
probe assisted;
doping aluminum ... See more keywords