Articles with "doping aluminum" as a keyword



Photo from wikipedia

Probe assisted localized doping of aluminum into silicon substrates

Sign Up to like & get
recommendations!
Published in 2019 at "Journal of Applied Physics"

DOI: 10.1063/1.5065385

Abstract: Precise control of dopant placement is crucial for the reproducible, and reliable, nanoscale semiconductor device fabrication. In this paper, we demonstrate an atomic force microscopy (AFM) probe assisted localized doping of aluminum into an n-type… read more here.

Keywords: localized doping; microscopy; probe assisted; doping aluminum ... See more keywords