Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101612
Abstract: There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance. This paper introduces the principle of an in-plane vibration micromechanical resonant accelerometer… read more here.
Keywords: loop control; loop; control; resonant accelerometer ... See more keywords