Experimental validity of double-curling probe method in film-depositing plasma
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DOI: 10.1088/1361-6595/ac1b35
Abstract: This journal article shows our recent research about the validity of the double-curling method while a film deposition occurs. Curling probe is one of the microwave resonators mainly utilized to measure the electron density in… read more here.
Keywords: double curling; probe; film; probe method ... See more keywords