Articles with "double imprint" as a keyword



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Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques

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Published in 2017 at "Microelectronic Engineering"

DOI: 10.1016/j.mee.2017.01.009

Abstract: The preparation of transparent complex 3D structures over large areas at low cost paves the way for numerous optical applications. We prepared nanostructures on the surface of microstructures in a negative tone photoresist by a… read more here.

Keywords: double imprint; structures via; via double; sacrificial mould ... See more keywords