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Systematic efficiency study of line-doubled zone plates

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Published in 2017 at "Microelectronic Engineering"

DOI: 10.1016/j.mee.2017.01.017

Abstract: Abstract Line-doubled Fresnel zone plates provide nanoscale, high aspect ratio structures required for efficient high resolution imaging in the multi-keV x-ray range. For the fabrication of such optics a high aspect ratio HSQ resist template… read more here.

Keywords: study; doubled zone; efficiency; zone plates ... See more keywords