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Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.01.017
Abstract: Abstract Line-doubled Fresnel zone plates provide nanoscale, high aspect ratio structures required for efficient high resolution imaging in the multi-keV x-ray range. For the fabrication of such optics a high aspect ratio HSQ resist template…
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Keywords:
study;
doubled zone;
efficiency;
zone plates ... See more keywords