Elimination of double position domains (DPDs) in epitaxial 〈111〉-3C-SiC on Si(111) by laser CVD
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DOI: 10.1016/j.apsusc.2017.07.239
Abstract: Abstract Elimination of double position domains (DPDs) in epitaxial 〈111〉-3C-SiC film on Si(111) substrate was conducted by laser chemical vapor deposition (LCVD) without carbonization. Transmission electron microscopy and pole figure were employed to investigate the… read more here.
Keywords: position domains; double position; dpds epitaxial; elimination double ... See more keywords