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Published in 2018 at "Technical Physics Letters"
DOI: 10.1134/s1063785018110020
Abstract: In this paper, we simulated the dependence of the effect of reducing the drain-induced barrier lowering on the thickness of a buried oxide layer in a finned (vertical) metal-oxide-semiconductor field effect transistor (FinFET) based on…
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Keywords:
shape;
buried oxide;
thickness buried;
effect ... See more keywords