Articles with "drift error" as a keyword



Photo from wikipedia

Beam drift error and control technology for scanning beam interference lithography.

Sign Up to like & get
recommendations!
Published in 2017 at "Applied optics"

DOI: 10.1364/ao.56.004138

Abstract: To improve the quality of grating masks made by scanning beam interference lithography, this article established a mathematical model of step-scanning exposure and analyzed the effects of the beam drift error on the interference image.… read more here.

Keywords: drift; interference; scanning beam; drift error ... See more keywords