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Characterization of hole taper in laser drilling of silicon nitride ceramic under water

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Published in 2018 at "Ceramics International"

DOI: 10.1016/j.ceramint.2018.04.173

Abstract: Abstract Nanosecond pulsed laser drilling of silicon nitride ceramic was conducted in air and under water to study the effects of laser scanning speed and processing environment on the hole taper. Results showed that drilling… read more here.

Keywords: silicon nitride; laser drilling; water; drilling silicon ... See more keywords