A new MEMS based variable capacitor using electrostatic vertical comb drive actuator and auxiliary cantilever beams
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DOI: 10.1007/s00542-019-04293-7
Abstract: We have proposed a new wide tunable MEMS variable capacitor. In the proposed structure, an electrostatic vertical comb drive actuator is used to extend the tuning range. Moreover, the auxiliary cantilever-beams are used in the… read more here.
Keywords: variable capacitor; drive actuator; actuator; comb drive ... See more keywords