Linear variable optical attenuators with shaped-finger comb-drive actuators.
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DOI: 10.1364/ao.59.000277
Abstract: A design method is proposed for variable optical attenuators (VOAs), aiming at linear attenuation-voltage characteristics, and verified by finite element analysis. Devices of interest are planar VOAs based on microelectromechanical systems technology, with either a… read more here.
Keywords: drive actuators; variable optical; linear variable; comb drive ... See more keywords