Modelling and optimization of single drive 3-axis MEMS gyroscope
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DOI: 10.1007/s00542-020-04840-7
Abstract: This paper presents a design optimization approach for a single-drive, 3-axis Microelectromechanical Systems (MEMS) gyroscope. Mathematical models for springs are obtained and a simplified structure for single-drive, 3-axis MEMS gyroscope is proposed. In the proposed… read more here.
Keywords: single drive; drive axis; mathrm; mathrm mathrm ... See more keywords