Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer
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DOI: 10.1016/j.measurement.2020.108377
Abstract: Abstract This paper presents design optimization, numerical modelling, fabrication and characterization of a single-axis comb drive MEMS gap-changeable differential capacitive accelerometer with a compact footprint of 2 mm × 2 mm. High sensitivity is achieved by optimizing the ratio… read more here.
Keywords: mems gap; gap changeable; sensitivity; drive mems ... See more keywords
Bifurcation Analysis on the Periodic Response of a Comb Drive MEMS Resonator
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DOI: 10.3390/mi13020148
Abstract: In this paper, we investigate the bifurcation characteristics of a comb drive MEMS resonator. The method of averaging and the residue theorem are used to get a more accurate analytical solution for the periodic response.… read more here.
Keywords: response; periodic response; comb drive; bifurcation ... See more keywords