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Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa4ea1
Abstract: Variation in actuation voltage for RF MEMS switches is observed as a result of stress-generated buckling of MEMS structures. Large voltage driven RF-MEMS switches are a major concern in space bound communication applications. In this…
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Keywords:
voltage;
low voltage;
voltage driven;
switch ... See more keywords