Piezoelectric deformable mirror driven by unimorph actuator arrays on multi-spatial layers.
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DOI: 10.1364/oe.485078
Abstract: In order to reduce the cost of the piezo actuator array deformable mirror (DM), a piezoelectric DM driven by unimorph actuator arrays on multi-spatial layers is proposed. The actuator density can be multiplied by increasing… read more here.
Keywords: unimorph actuator; actuator; deformable mirror; driven unimorph ... See more keywords