Reactive dynamics analysis of critical Nb2O5 sputtering rate for drum-based metal-like deposition.
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DOI: 10.1364/ao.56.00c206
Abstract: Drum-based metal-like film deposition for oxide was investigated using single wavelength in situ monitoring. The data were used to investigate the oxidation mechanism using combined second-order kinetic and parabolic models. A critical Nb2O5 deposition rate… read more here.
Keywords: drum based; deposition; rate; based metal ... See more keywords