Investigation on the temporal evolution of the Druyvesteyn distribution function between sheath and presheath region in material processing plasmas
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DOI: 10.1088/1402-4896/adb248
Abstract: The energy distribution of particles in a gaseous system is primarily understood by the Maxwell–Boltzmann distribution function. However, in the case of partially ionized discharge plasmas which provide a unique attribute in the event of… read more here.
Keywords: distribution; function; druyvesteyn distribution; material processing ... See more keywords