Sub-surface Damage of Ultra-Thin Monocrystalline Silicon Wafer Induced by Dry Polishing
Sign Up to like & getrecommendations! Published in 2020 at "Electronic Materials Letters"
DOI: 10.1007/s13391-020-00226-z
Abstract: Abstract Ultra-thin wafer fabrication has become a hot spot in recent years with the growing demand for small size and high performance electronic devices. However, far less research focused on the damage behavior in ultra-thin… read more here.
Keywords: dry polishing; ultra thin; thin wafer; wafer ... See more keywords
A dry polishing technique for the petrographic examination of mudrocks
Sign Up to like & getrecommendations! Published in 2017 at "International Journal of Coal Geology"
DOI: 10.1016/j.coal.2017.03.013
Abstract: Abstract A method of high-quality dry polishing is presented here, in which lubricating agents such as water, isopropyl alcohol, oils and water-based diamond suspensions are eliminated. This method has been developed to avoid various problems… read more here.
Keywords: polishing technique; technique petrographic; dry polishing; microscopy ... See more keywords