Modeling and identification of vibration transmission in a dual-servo stage
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DOI: 10.1016/j.jsv.2018.06.030
Abstract: Abstract During the operation of a dual-servo stage, the coarse stage and fine stage maintain a constant distance, and vibration of the coarse stage can be transmitted to the fine stage. A Lorentz planar motor… read more here.
Keywords: vibration; servo stage; vibration transmission; dual servo ... See more keywords