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Published in 2020 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/ab63b2
Abstract: This paper presents a novel uniaxial microscopic 3D profilometry method using a structured light system with dual-telecentric lenses in micro-scale devices. Specifically, a telecentric lens can produce an orthographic view of an object and provide…
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Keywords:
structured light;
system;
micro scale;
dual telecentric ... See more keywords