A novel ductile machining model of single-crystal silicon for freeform surfaces with large azimuthal height variation by ultra-precision fly cutting
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DOI: 10.1016/j.ijmachtools.2018.07.005
Abstract: Abstract Ultra-precision fly cutting (UPFC) is an important technology in the fabrication of freeform surfaces on single-crystal silicon. However, the insufficient understanding of the ductile machining mechanisms in UPFC of silicon under a large depth… read more here.
Keywords: freeform surfaces; machining model; ductile machining; silicon ... See more keywords