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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13091463
Abstract: Carbon-rich SiCN ceramics were prepared by divinylbenzene (DVB)-modified polysilazane (PSN2), and a high-conductivity SiCN thin film sensor suitable for medium-low temperature sensing was fabricated. The modified liquid precursors were patterned by direct ink writing to…
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Keywords:
sicn ceramics;
dvb modified;
conductivity;
sicn thin ... See more keywords