Calibration of piezo actuators and systems by dynamic interferometry
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DOI: 10.3762/bjnano.16.143
Abstract: To achieve precise measurements of small displacements in non-contact atomic force microscopy, it is crucial to control the position of moving parts with high accuracy. This is commonly accomplished by piezo actuators, for instance, in… read more here.
Keywords: calibration piezo; dynamic interferometry; systems dynamic; piezo actuators ... See more keywords