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Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.3020230
Abstract: We present a study of the natural (resonance) frequencies of a tunable in-plane Microelectromechanical portal frame (U-shape) under DC electrostatic loads. The structure is designed and fabricated to excite the in-plane anti-symmetric (sway, first) and…
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Keywords:
frame;
portal frame;
characterization shaped;
dynamics characterization ... See more keywords