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Formation mechanisms of boron oxide films fabricated by large-area electron beam-induced deposition of trimethyl borate

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Published in 2018 at "Beilstein Journal of Nanotechnology"

DOI: 10.3762/bjnano.9.120

Abstract: Boron-containing materials are increasingly drawing interest for the use in electronics, optics, laser targets, neutron absorbers, and high-temperature and chemically resistant ceramics. In this article, the first investigation into the deposition of boron-based material via… read more here.

Keywords: induced deposition; beam induced; deposition; boron ... See more keywords