Strain measurement of 3D structured nanodevices by EBSD.
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DOI: 10.1016/j.ultramic.2017.08.009
Abstract: We present a new methodology to accurately measure strain magnitudes from 3D nanodevices using Electron Backscatter Diffraction (EBSD). Because the dimensions of features on these devices are smaller than the interaction volume for backscattered electrons,… read more here.
Keywords: strain; ebsd strain; strain measurement; measurement structured ... See more keywords