An Improved STEM/EDX Quantitative Method for Dopant Profiling at the Nanoscale
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DOI: 10.1017/s1431927619015241
Abstract: Abstract In this paper, an improved quantification technique for STEM/EDX measurements of 1D dopant profiles based on the Cliff-Lorimer equation is presented. The technique uses an iterative absorption correction procedure based on density models correlating… read more here.
Keywords: stem edx; edx quantitative; error; improved stem ... See more keywords