The Effect of Compliant Backplate on Capacitive MEMS Microphones
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DOI: 10.1109/jsen.2024.3392841
Abstract: This article presents a lumped-parameter model (LPM) providing a deeper understanding of the compliant backplate in capacitive micro-electromechanical systems (MEMS) microphones. Some previous models simplify the backplate as stationary, whereas others treat it as vibrating.… read more here.
Keywords: mems microphones; backplate capacitive; backplate; effect compliant ... See more keywords