Effect of nanoconfinement on the sputter yield in ultrathin polymeric films: Experiments and model
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DOI: 10.1016/j.apsusc.2018.03.041
Abstract: Abstract This fundamental contribution on secondary ion mass spectrometry (SIMS) polymer depth-profiling by large argon clusters investigates the dependence of the sputter yield volume (Y) on the thickness (d) of ultrathin films as a function… read more here.
Keywords: nanoconfinement sputter; effect nanoconfinement; sputter yield; yield ultrathin ... See more keywords