The Effect of Nitridation on Sputtering AlN on Composited Patterned Sapphire Substrate
Sign Up to like & getrecommendations! Published in 2023 at "Materials"
DOI: 10.3390/ma16031104
Abstract: Here, we report on the epitaxial growth of GaN on patterned SiO2-covered cone-shaped patterned sapphire surfaces (PSS). Physical vapor deposition (PVD) AlN films were used as buffers deposited on the SiO2-PSS substrates. The gallium nitride… read more here.
Keywords: growth; patterned sapphire; microscopy; effect nitridation ... See more keywords