Effect of Photoillumination on Gold-Nanoparticle-Assisted Chemical Etching of Silicon
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DOI: 10.1155/2018/5479605
Abstract: Metal-assisted chemical etching (MacEtch) has attracted considerable attention for its ability to fabricate micro- and nanostructures with high aspect ratios and its applications in other microelectromechanical fields. However, few studies have reported the effect of… read more here.
Keywords: chemical etching; effect; effect photoillumination; assisted chemical ... See more keywords