Effect of wrinkles on extreme ultraviolet pellicle reflectivity and local critical dimension.
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DOI: 10.1364/ao.461413
Abstract: Extreme ultraviolet (EUV) pellicles must have an EUV reflectance (EUVR) below 0.04% to prevent the reduction of critical dimension (CD). However, pellicle wrinkles cause localized CD variation by locally amplifying the EUVR. This study demonstrates… read more here.
Keywords: extreme ultraviolet; wrinkles extreme; pellicle; critical dimension ... See more keywords