Annealing effects in ITO based ceramic thin film thermocouples
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DOI: 10.1016/j.jallcom.2016.12.234
Abstract: Abstract Nitrogen doped indium oxide (InON) and indium tin oxide (ITON) thin films were fabricated with reactive sputtering in nitrogen-rich plasmas for high temperature thermocouples. Different annealing processes were applied to improve the performance of… read more here.
Keywords: ito based; effects ito; thin film; film thermocouples ... See more keywords